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Microelectronic Fabrication Technology (PGT 330/3): Subject Guides to Microelectronic Fabrication Technology

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Subject Guides to Microelectronic Fabrication Technology

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Course Synopsis

This course on advance fabrication technology focuses on the concept and the basics of semiconductor materials, process technology and the fabrication processes of Integrated Circuits (ICs). The students will also be exposure to the fabrication process from oxidation, photolithography, etching, e-beam lithography, diffusion, implanatation, metallization and characterization. 

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Subject Guide

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Maziah Md Isa
Contact:
Perpustakaan Tuanku Syed Faizuddin Putra, Universiti Malaysia Perlis, Bangunan KWSP, Jalan Bukit Lagi, 01000 Kangar Perlis
04-9798601

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