Skip to main content

Microelectronic Fabrication (EMT 367/3): Subject Guides to Microelectronic Fabrication

e-Journal Packages

Electronic journals on microelectronic fabrication subject areas are offered by the following electronic packages:

E-Books Packages

Users can find millions of chapters and books related to microelectronic fabrication from following packages:

Subject Guides to Microelectronic Fabrication

Use this subject guide to help you finding information on the subject, Microelectronic Fabrication. The Library provides both printed, multimedia and electronic resources to help you finding relevant information for your assignments, teaching-learning and research projects. If you need more information about the subject, please feel free to contact us via voice mail, email or Ask Us platforms.

Course Synopsis

This course focuses on the fabrication process module of the CMOS technology. The students should be able to design, produce a mask, prepare the runcard (process flow of the MOSFET), fabricate the MOSFET, analyse and characterise the devices electrically. The students should also able to understand the important CMOS process modules such as well technology, isolation technology, multi level interconnect technology as well as related device issues mainly associated with the device miniaturisation.

Topics covered in this course are as follow:

1. Microelectronic fabrication overview

2. Standard CMOS process flow and cross section

3. CMOS process sub-integration module:

     i) Well technology

    ii) MOS device isolation technology

   iii) Gate oxide integrity and characterisation

   iv)  Multilevel interconnect technology (metallisation and multilevel dieelctrics, planarisation, contact and via)

   v) MOS scaling effect; short channel effect, hot carrier effect, device characterisation

   vi) IV and CV test

Searching for Printed Books

Printed Books are located at both Main Library and Branch Library in Kangar. This is due to nature of this subjects, we were fairly needed by students and researchers in other subject areas. Users can use our Online Public Access Catalog (OPAC) or our Integrated search facility called Worldcat Local to help you finding printed items. Use search strategies including Title Search, Keyword Search or Subject Seach to facilitate access to relevant materials especially printed books.

                          Advanced Search

Finding Scholarly Articles & Books

Search for relevant items via our Integrated Search, Worldcat Local:


Subject Guide

Mohd Shahrul Annuar Alawi's picture
Mohd Shahrul Annuar Alawi
Kampus UniCiti

Remote Access Users

Remote Access to our e-Resources 

Password :