Microelectronic Fabrication (EMT 367/3)

For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors.The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deepUVsub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting.For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

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This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the Geld for over two decades, and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modulized format.