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Micro-Optical-Electro-Mechanical-Systems (EMT 496/3)  

Last Updated: Jul 17, 2016 URL: http://libguides.unimap.edu.my/content.php?pid=700506 Print Guide RSS UpdatesEmail Alerts

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Subject Guides to Micro-Optical-Electro-Mechanical-Systems

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Course Synopsis

This course is an introductory abaout MOEMS in term of fabrication and its systems. MOEMS is related with the integration of micro-optic and Micro-Optical-Electro-Mechanical system (MEMS) which involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems. Both of these two technologies independently involve in batch processing similiar to integrated circuits, and micromachining similar to fabrication of microsensor.

 

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