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Micro-Electron-Mechanical System (PGT 430/3)  

Last Updated: Oct 28, 2014 URL: Print Guide RSS UpdatesEmail Alerts

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Course Synopsis

This course will focus on design and simulation of N/MEMSdevices. The design will include several of analysis types suchas structural, electrical and mechanical while the fabricationtechnology will focus on bulk and surface micromachining. Thiscourse will also discuss the application and technology of N/ MEMS packaging in various fields


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Subject Guide

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Maziah Md Isa
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Unit Pembangunan Sumber dan Metadata
Perpustakaan Tuanku Syed Faizuddin Putra
Universiti Malaysia Perlis
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