This is the "Subject Guides to Micro-Electro-Mechanical-Systems" page of the "Micro-Electro-Mechanical-Systems (EMT 490/3)" guide.
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Micro-Electro-Mechanical-Systems (EMT 490/3)  

Last Updated: Jul 17, 2016 URL: Print Guide RSS UpdatesEmail Alerts

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Course Synopsis

This course will focus on design and simulation of MEMS devices. The design will include various of analysis types such as structural, electrical and  mechanical while the fabrication technology will focus on bulk and surface micromachining. This course will also discuss the application and technology of MEMS packaging in various fields.


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