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Fundamental of Microelectronic Fabrication (EMT 357/3): Subject Guides to Microelectronic Fabrication (EMT 357/3)

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Subject Guides to Fundamental of Microelectronic Fabrication

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Course Synopsis

This introductory course on microelectronic fabrication focuses on the concept and the basics of semiconductor materials, process technology and the fabrication processes of Integrated Circuits (ICs). Topics covered in this course are as follow Introduction to Microelectronic Fabrication, Cleanroom Technology, Safety & Protocol, Basics of Semiconductor, Wafer Manufacturing, Semiconductor Materials, Wafer Cleaning, Thermal Processes I: Oxidation, Thermal Processes II: Diffusion, Thermal Processes III: Ion Implantation & Annealing, Photolithography I, Photolithography II, Metallization
I : CVD, Metallization II : PVD and Etching.

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Subject Guide

Mohd Shahrul Annuar Alawi's picture
Mohd Shahrul Annuar Alawi
Kampus UniCiti

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